FUNCTIONALIZED OXOACID LUBRICANTS IN MEMS DEVICES
卷宗概要
发明人
John Faruk ALPTEKIN; Uroob HARIS; Muralidhar HANABE
IPC 分类
CPC 分类
In examples, a microelectromechanical systems (MEMS) device comprises a moveable element configured to contact a portion of a surface, and a film formed of a self-assembled lubricant, the lubricant comprising a compound having (i) an oxoacid moiety and (ii) a hydrophobic moiety with an A value of equal to or greater than about 3 kilocalories/mole on the portion of the surface.
原文（中文）
In examples, a microelectromechanical systems (MEMS) device comprises a moveable element configured to contact a portion of a surface, and a film formed of a self-assembled lubricant, the lubricant comprising a compound having (i) an oxoacid moiety and (ii) a hydrophobic moiety with an A value of equal to or greater than about 3 kilocalories/mole on the portion of the surface.