Fiducial Structure for Inspection of Semiconductor Workpieces
卷宗概要
发明人
Edward Robert Van Brunt; Jared A. Langan; Robert Leonard
IPC 分类
CPC 分类
An example semiconductor workpiece imaging system includes an imaging device. The example semiconductor workpiece imaging system includes a workpiece holder operable to receive a semiconductor workpiece. The example semiconductor workpiece imaging system includes a fiducial structure having one or more fiducial markers. The one or more fiducial markers and at least a portion of the semiconductor workpiece are detectable in a plurality of different image modalities.
原文（中文）
An example semiconductor workpiece imaging system includes an imaging device. The example semiconductor workpiece imaging system includes a workpiece holder operable to receive a semiconductor workpiece. The example semiconductor workpiece imaging system includes a fiducial structure having one or more fiducial markers. The one or more fiducial markers and at least a portion of the semiconductor workpiece are detectable in a plurality of different image modalities.