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OPTICAL DEVICES AND METHODS OF MANUFACTURE
发明专利审中
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20权利要求 · 3 独立
§ Ⅰ
卷宗概要
申请人
Taiwan Semiconductor Manufacturing Co., Ltd.
发明人
Chia-Han Tsou; Yu-Siang Lin; Ming-Fa Chen
IPC 分类
G2B 6/34G2B 5/18
CPC 分类
G2B6/34G2B5/1847
A method of forming an optical device as well as the optical device itself are described herein in which a waveguide is formed over a substrate and a meta-atom material is deposited over the waveguide. Once deposited, the metal-atom material is patterned to form a grating coupler over the waveguide.
原文（中文）
A method of forming an optical device as well as the optical device itself are described herein in which a waveguide is formed over a substrate and a meta-atom material is deposited over the waveguide. Once deposited, the metal-atom material is patterned to form a grating coupler over the waveguide.