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END EFFECTOR
发明专利审中
29权利要求 · 2 独立
§ Ⅰ
卷宗概要
发明人
Richard BLANK; Roy Scott POWELL
IPC 分类
H1L 21/67B25J 11/B25J 15/B25J 19/2H1L 21/687
CPC 分类
H1L21/67248B25J11/95B25J15/14B25J19/2H1L21/68707
An end effector for supporting a wafer, the end effector having a temperature sensor that is configured to sense a temperature of a wafer supported by the end effector.
原文（中文）
An end effector for supporting a wafer, the end effector having a temperature sensor that is configured to sense a temperature of a wafer supported by the end effector.