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HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING MOIRÉ BASED METROLOGY AND VACUUM BASED PICK-AND-PLACE
发明专利审中
11权利要求 · 1 独立
§ Ⅰ
卷宗概要
申请人
Board of Regents, The University of Texas System
发明人
Sidlgata V. Sreenivasan; Paras Ajay; Aseem Sayal; Mark McDermott; Shrawan Singhal; Ovadia Abed; Lawrence Dunn; Vipul Goyal; Michael Cullinan
IPC 分类
H1L 21/683B81C 99/G6F 30/392G6F 30/396G6F 30/398G6F 117/10H1L 23/544
CPC 分类
H1L21/6835B81C99/2G6F30/392G6F30/396G6F30/398H1L21/6838H1L23/544G6F2117/10H1L2221/68309H1L2221/68322H1L2221/68354H1L2221/68368H1L2221/68381H1L2223/54426H1L2223/54473
A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise moiré alignment techniques resulting in highly accurate, parallel assembly of feedstocks.
原文（中文）
A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise moiré alignment techniques resulting in highly accurate, parallel assembly of feedstocks.