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METHODS FOR ELECTRICAL PROPERTY DEPTH PROFILING THROUGH FILMS WITH GRADED COMPOSITION
发明专利审中
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14权利要求 · 1 独立
§ Ⅰ
卷宗概要
发明人
Bulent M. BASOL; Abhijeet JOSHI
IPC 分类
H1L 21/66G1B 7/6
CPC 分类
H1L22/14G1B7/105
A method of obtaining a depth profile of an electrical property through a film with a composition varying as a function of depth is disclosed.
原文（中文）
A method of obtaining a depth profile of an electrical property through a film with a composition varying as a function of depth is disclosed.