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BACKSIDE POWER DELIVERY NETWORK HEAT DISSIPATION

发明专利审中
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20权利要求 · 3 独立
§ Ⅰ

卷宗概要

发明人

HUIMEI ZHOU; Oleg Gluschenkov; Ruilong Xie

IPC 分类

H1L 23/373H1L 23/29H1L 23/528H1L 23/532

CPC 分类

H1L23/3736H1L23/291H1L23/5286H1L23/53228H1L23/53276

A structure comprising: a back-end-of-line portion on top of a device, wherein the device comprises a hot circuit and a cold circuit; a wafer on top of the back-end-of-line portion; a backside power distribution network on a side of the wafer; a thermal sink underneath the device and the backside power distribution network; and one or more scaling balls underneath the thermal sink and on top of a laminate.

原文(中文)

A structure comprising: a back-end-of-line portion on top of a device, wherein the device comprises a hot circuit and a cold circuit; a wafer on top of the back-end-of-line portion; a backside power distribution network on a side of the wafer; a thermal sink underneath the device and the backside power distribution network; and one or more scaling balls underneath the thermal sink and on top of a laminate.