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ELECTRONIC DEVICE

发明专利审中
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20权利要求 · 2 独立
§ Ⅰ

卷宗概要

发明人

Chia-Ping TSENG; Po-Yun HSU

IPC 分类

H1L 23/538H1L 21/48H1L 23/15

CPC 分类

H1L23/5384H1L21/486H1L23/15

An electronic device and a manufacturing method thereof are provided. The electronic device includes a substrate, a seed layer, and a conductor layer. The substrate has a first surface and a second surface opposite to the first surface. The substrate includes a through hole, and the through hole has a sidewall connected to the first surface and the second surface. The seed layer is disposed on the first surface, the second surface, and the sidewall. The conductor layer is disposed on the seed layer, and a roughness of a surface of the seed layer is greater than or equal to 1 nm and less than or equal to 1 μm.

原文(中文)

An electronic device and a manufacturing method thereof are provided. The electronic device includes a substrate, a seed layer, and a conductor layer. The substrate has a first surface and a second surface opposite to the first surface. The substrate includes a through hole, and the through hole has a sidewall connected to the first surface and the second surface. The seed layer is disposed on the first surface, the second surface, and the sidewall. The conductor layer is disposed on the seed layer, and a roughness of a surface of the seed layer is greater than or equal to 1 nm and less than or equal to 1 μm.