METHOD AND APPARATUS FOR BONDING WITH CURVED BONDING HEADS
卷宗概要
发明人
Mario Johannes Meissl; Anshuman Cherala
IPC 分类
CPC 分类
An apparatus for bonding multiple pluralities of chiplets to a destination substrate includes one or more bonding heads, each bonding head of the one or more bonding heads having a curved surface configured to hold a plurality of chiplets, a destination stage configured to hold the destination substrate, and a controller configured to operate the movement of the one or more bonding heads and the destination stage. The controller includes a plurality of motors configured to drive each bonding head of the one or more bonding heads in at least in the θX, θY, and Z, directions. The curved surface is a convex surface having a curvature bulging towards the destination stage.
原文（中文）
An apparatus for bonding multiple pluralities of chiplets to a destination substrate includes one or more bonding heads, each bonding head of the one or more bonding heads having a curved surface configured to hold a plurality of chiplets, a destination stage configured to hold the destination substrate, and a controller configured to operate the movement of the one or more bonding heads and the destination stage. The controller includes a plurality of motors configured to drive each bonding head of the one or more bonding heads in at least in the θX, θY, and Z, directions. The curved surface is a convex surface having a curvature bulging towards the destination stage.