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RELAXED WURTZITE INGAN LAYERS

发明专利审中
29权利要求 · 1 独立
§ Ⅰ

卷宗概要

发明人

MICHAEL R. KRAMES; YAO CHEN; JEAN-FRANCOIS CARLIN; ETIENNE GIRAUD; NICOLAS GRANDJEAN

IPC 分类

H1S 5/2C30B 29/40H1S 5/343H10H 20/825H10H 20/85

CPC 分类

H1S5/211C30B29/406H1S5/34333H10H20/825H10H20/8508

Bulk relaxed Wurtzite In-containing III-nitride layers having a smooth and substantially pit-free surface morphology and an interface region having a substantially relaxed in-plane a-lattice parameter and characterized by a single-phase gallium-polar (0001) orientation are disclosed. Methods of making the bulk relaxed Wurtzite In-containing III-nitride layers using MOCVD growth conditions are also disclosed. Semiconductor structures include epitaxial layers grown on a bulk relaxed Wurtzite In-containing III-nitride layer. The semiconductor structures can be used in optoelectronic devices such as in light sources for illumination and display applications.

原文(中文)

Bulk relaxed Wurtzite In-containing III-nitride layers having a smooth and substantially pit-free surface morphology and an interface region having a substantially relaxed in-plane a-lattice parameter and characterized by a single-phase gallium-polar (0001) orientation are disclosed. Methods of making the bulk relaxed Wurtzite In-containing III-nitride layers using MOCVD growth conditions are also disclosed. Semiconductor structures include epitaxial layers grown on a bulk relaxed Wurtzite In-containing III-nitride layer. The semiconductor structures can be used in optoelectronic devices such as in light sources for illumination and display applications.