LAMÉ MODE RESONATOR WITH ALUMINUM NITRIDE (AlN) MIRROR LAYER
卷宗概要
发明人
Ralph DURNER
IPC 分类
CPC 分类
Aspects include devices and methods for a resonator with an aluminum nitride mirror layer. Some aspects may include an aluminum nitride layer formed on or above a substrate, an electrode layer formed on or above the aluminum nitride layer opposite the substrate, a piezoelectric layer formed on the electrode layer, and an interdigital transducer formed on the piezoelectric layer.
原文（中文）
Aspects include devices and methods for a resonator with an aluminum nitride mirror layer. Some aspects may include an aluminum nitride layer formed on or above a substrate, an electrode layer formed on or above the aluminum nitride layer opposite the substrate, a piezoelectric layer formed on the electrode layer, and an interdigital transducer formed on the piezoelectric layer.