MEASURING DEVICE BASED ON A COMBINATION OF OPTICAL 2D AND 3D IMAGE CAPTURING METHODS

原文（中文）

Measurement apparatus () that is also suitable for a manufacturing or inspection system, comprising a light source () for emitting an illumination light beam () and a reference light beam (), an imaging lens () that directs measurement light () and reference light () onto a 2 D image sensor () and a 3D image sensor (), wherein the measurement apparatus () is configured to substantially reduce the intensity of the reference light () incident on the 2D image sensor () if it is operating in a 2D imaging mode.