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ISO IMAGE SENSORS AND METHOD OF FORMING THE SAME

发明专利审中
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20权利要求 · 3 独立
§ Ⅰ

卷宗概要

发明人

Wen-Chang Kuo; Yen-Yu Chen; Jen-Cheng Liu; Yen-Ting Chiang; Cheng-Yu Huang

IPC 分类

H1L 27/146

CPC 分类

H10F39/806H10F39/24H10F39/8067H10F39/807

Various embodiments of the present disclosure are directed towards a semiconductor device with a substrate where the substrate has a plurality of protrusions over a photodetector. An isolation structure is disposed in the substrate and laterally surrounds the photodetector. The isolation structure has a reflective element with a conductive material. A first dielectric layer is over the photodetector, where the first dielectric layer extends into the substrate and is disposed between the reflective element and the substrate. A top surface of the first dielectric layer is irregular. A second dielectric layer is on the first dielectric layer and over the photodetector. A top surface of the second dielectric layer over the plurality of protrusions is irregular. The second dielectric layer extends vertically into the substrate along a surface of the first dielectric layer. The second dielectric layer is disposed along sidewalls and a bottom surface of the reflective element.

原文(中文)

Various embodiments of the present disclosure are directed towards a semiconductor device with a substrate where the substrate has a plurality of protrusions over a photodetector. An isolation structure is disposed in the substrate and laterally surrounds the photodetector. The isolation structure has a reflective element with a conductive material. A first dielectric layer is over the photodetector, where the first dielectric layer extends into the substrate and is disposed between the reflective element and the substrate. A top surface of the first dielectric layer is irregular. A second dielectric layer is on the first dielectric layer and over the photodetector. A top surface of the second dielectric layer over the plurality of protrusions is irregular. The second dielectric layer extends vertically into the substrate along a surface of the first dielectric layer. The second dielectric layer is disposed along sidewalls and a bottom surface of the reflective element.