MESA POROSIFICATION PROCESS
卷宗概要
申请人
Commissariat à I'Énergie Atomique et aux Énergies Alternatives
发明人
Carole Pernel; Margaux Audibert; Valentin Vivares
IPC 分类
CPC 分类
A process for porosifying a structure including a base substrate covered with mesas, the mesas being (Al, In, Ga)N or InP mesas or (Al, In, Ga)N/(Al, In, Ga)N or InP/InP mesas, the mesas being electrochemically porosified according to the following cycle of steps: i) applying a first potential for a first duration, ii) applying a second potential for a second duration, whereby porosified mesas are obtainedincluding, from the side faces of the mesas towards the center of the mesas or vice versa, a first portion having a first porosification ratio and a second portion, the second portion having a second porosification ratio higher than the first porosification ratio or the second portion being hollowed out.
原文（中文）
A process for porosifying a structure including a base substrate covered with mesas, the mesas being (Al, In, Ga)N or InP mesas or (Al, In, Ga)N/(Al, In, Ga)N or InP/InP mesas, the mesas being electrochemically porosified according to the following cycle of steps: i) applying a first potential for a first duration, ii) applying a second potential for a second duration, whereby porosified mesas are obtainedincluding, from the side faces of the mesas towards the center of the mesas or vice versa, a first portion having a first porosification ratio and a second portion, the second portion having a second porosification ratio higher than the first porosification ratio or the second portion being hollowed out.