№ EP4673719A1发明专利
审中MEASUREMENT METHOD FOR DETERMINING A REPLICATION PARAMETER, AND REPLICATION METHOD USING THE DETERMINED REPLICATION PARAMETER
MEASUREMENT METHOD FOR DETERMINING A REPLICATION PARAMETER, AND REPLICATION METHOD USING THE DETERMINED REPLICATION PARAMETER
❖Carl Zeiss Jena GmbHGIEHL, Markus; BLECHSCHMIDT, ChristianJan 6, 2026G01M, G03H, G03H +218