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档案
POLYMER FOR COMPOSITION FOR FORMING ORGANIC FILM, METHOD FOR MANUFACTURING THE SAME, COMPOSITION FOR FORMING ORGANIC FILM CONTAINING THE POLYMER, METHOD FOR FORMING ORGANIC FILM USING THE COMPOSITION, AND PATTERNING PROCESS USING THE COMPOSITION
发明专利审中
§ Ⅰ
卷宗概要
发明人
SAWAMURA, Takashi; IMATA, Tomohiro; MATSUBARA, Satoshi
申请日
Jun 17, 2025
公开日
Jan 6, 2026
IPC 分类
G03FC09DG03F
CPC 分类
G03FG03FC09DC08GC08G