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发明专利patent.status.granted
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H10K 71/40C23C 14/58H10H 20/H10K 30/10H10K 30/40H10K 30/50H10K 30/81H10K 30/85H10K 30/86H10K 71/60H10K 71/70
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H10K71/40C23C14/5806H10H20/1H10K30/10H10K30/40H10K30/50H10K30/81H10K30/85H10K30/86H10K71/60H10K71/70