ASSEMBLY FOR AN ULTRAVIOLET-OZONE CLEANING SYSTEM
卷宗概要
发明人
Tara Chan; Mitchell Faust; Kira Purvin; Hongbo Si; Sylvi Haendel; Jason Lerch; Francis Chilese
IPC 分类
CPC 分类
An inspection tool to inspect a reticle includes an assembly with a body that includes concentric channels; a fluid inlet in fluid communication with the body; a fluid outlet in fluid communication with the body; and a printed circuit board having a plurality of LED dies. The printed circuit board is on an end of the body opposite the fluid inlet and the fluid outlet. Ozone is injected into a chamber of the inspection tool around an optical element. The LED dies generate light directed at the optical element. UV-ozone cleaning of the optical element is performed using the light from the LED dies.
原文（中文）
An inspection tool to inspect a reticle includes an assembly with a body that includes concentric channels; a fluid inlet in fluid communication with the body; a fluid outlet in fluid communication with the body; and a printed circuit board having a plurality of LED dies. The printed circuit board is on an end of the body opposite the fluid inlet and the fluid outlet. Ozone is injected into a chamber of the inspection tool around an optical element. The LED dies generate light directed at the optical element. UV-ozone cleaning of the optical element is performed using the light from the LED dies.