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TURBOMOLECULAR VACUUM PUMP AND METHODS FOR MANUFACTURING A ROTOR

发明专利审中
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17权利要求 · 2 独立
§ Ⅰ

卷宗概要

IPC 分类

F4D 19/4B33Y 80/F4D 29/2F4D 29/38

CPC 分类

F4D19/42F4D29/23F4D29/384B33Y80/F5D2240/301

A turbomolecular vacuum pump including a stator and a rotor designed to rotate in the stator. The rotor includes a hub and at least one blade stage including blades distributed regularly about the periphery of the hub. The blades of at least one blade stage of the rotor are hollow.

原文(中文)

A turbomolecular vacuum pump including a stator and a rotor designed to rotate in the stator. The rotor includes a hub and at least one blade stage including blades distributed regularly about the periphery of the hub. The blades of at least one blade stage of the rotor are hollow.