EVALUATION OF ABNORMALITIES OF A SAMPLE

原文（中文）

A method for evaluating a sample, the method includes performing one or more pump probe measurements, wherein a pump probe measurement includes (i) illuminating the sample by a laser pump beam that is modulated by a modulation frequency; (ii) illuminating the sample by a laser probe beam; (iii) detecting radiation resulting from the illumination of the sample; (iv) determining, based on the detected radiation, thermo-reflectance information regarding a sample region located at a depth of the sample; wherein the thermo-reflectance information comprises information about an oscillatory component of a thermal response of the sample measured during the pump probe measurement; and (v) determining a presence of one or more sample abnormalities based on the analysis results.