Evaluation Method and Analyzer Apparatus
卷宗概要
发明人
Konomi Ikita; Kenichi Tsutsumi
IPC 分类
CPC 分类
There is provided an evaluation method of evaluating the density of a sample. The evaluation method starts with acquiring a backscattered electron spectrum from the sample. Then, an elastically scattered peak of the spectrum is separated into a plurality of minor peaks by waveform separation. Information about the positions and widths of the minor peaks is derived. The chemical elements making up the sample are identified from the positions and widths of the minor peaks.
原文（中文）
There is provided an evaluation method of evaluating the density of a sample. The evaluation method starts with acquiring a backscattered electron spectrum from the sample. Then, an elastically scattered peak of the spectrum is separated into a plurality of minor peaks by waveform separation. Information about the positions and widths of the minor peaks is derived. The chemical elements making up the sample are identified from the positions and widths of the minor peaks.