TEST INTERCONNECT TEMPERATURE CONTROL WITH GAS FLOW

原文（中文）

Various embodiments include techniques for controlling temperature of a test socket in a test system. A temperature controller determines an input temperature associated with a reference device under test (DUT) mounted in the test socket. The temperature controller determines a flow rate of a gas based on the input temperature. The temperature controller adjusts a flow control valve to supply the gas to the reference DUT at the flow rate.