DETECTION OF STRUCTURAL DEFECTS IN AN INTEGRATED CIRCUIT
卷宗概要
申请人
STMicroelectronics International N.V.
发明人
Laurent Lopez
IPC 分类
CPC 分类
The integrated circuit is equipped with an annular wall including, in a first part, an alternation of conductive stacks containing metal tracks distributed over several metal levels and having an alternately reversed trapezoidal longitudinal section, all these tracks forming together at least one electrically conductive path having at least one staircase portion in a second part of the wall. Defect-detection circuit are located in the integrated circuit and connected to semiconductor zones buried in the substrate under the second part of the wall and connected to the two ends of the at least one electrically conductive path.
原文（中文）
The integrated circuit is equipped with an annular wall including, in a first part, an alternation of conductive stacks containing metal tracks distributed over several metal levels and having an alternately reversed trapezoidal longitudinal section, all these tracks forming together at least one electrically conductive path having at least one staircase portion in a second part of the wall. Defect-detection circuit are located in the integrated circuit and connected to semiconductor zones buried in the substrate under the second part of the wall and connected to the two ends of the at least one electrically conductive path.