High Throughput High Dynamic Range (HDR) Microscopy
卷宗概要
发明人
Matthew David Conrad; Jason William Leon Witry; Edward Robert Van Brunt
IPC 分类
CPC 分类
An example method includes obtaining a plurality of images of at least a portion of a semiconductor workpiece. Each of the plurality of images associated with exposing the at least a portion of the semiconductor workpiece to radiation at a different radiation intensity. The example method includes generating a composite workpiece image of at least a portion of the semiconductor workpiece based at least in part on the plurality of images.
原文（中文）
An example method includes obtaining a plurality of images of at least a portion of a semiconductor workpiece. Each of the plurality of images associated with exposing the at least a portion of the semiconductor workpiece to radiation at a different radiation intensity. The example method includes generating a composite workpiece image of at least a portion of the semiconductor workpiece based at least in part on the plurality of images.