ION SOURCE WITH MULTIPLE INTEGRATED ARC CHAMBERS
卷宗概要
发明人
Wilhelm Peter Platow; Neil J. Bassom
IPC 分类
CPC 分类
An ion source has an arc chamber and multiple electrode pairs that define a respective plasma column axis within the arc chamber. A source magnet surrounds the arc chamber and defines pole pairs, each respectively associated with the electrode pairs to confine a plasma to the respective plasma column axis. The source magnet can be an electromagnet or a permanent magnet. The electromagnet has coils and a magnetic core to define the pole pairs and confine the plasma to the respective plasma column based on a coil current supplied to the coils. The magnetic core can have movable core members to magnetically couple each of the plurality of pole pairs. The permanent magnet has a magnetic core and movable core members to selectively magnetically couple the permanent magnet to each of the plurality of pole pairs.
原文（中文）
An ion source has an arc chamber and multiple electrode pairs that define a respective plasma column axis within the arc chamber. A source magnet surrounds the arc chamber and defines pole pairs, each respectively associated with the electrode pairs to confine a plasma to the respective plasma column axis. The source magnet can be an electromagnet or a permanent magnet. The electromagnet has coils and a magnetic core to define the pole pairs and confine the plasma to the respective plasma column based on a coil current supplied to the coils. The magnetic core can have movable core members to magnetically couple each of the plurality of pole pairs. The permanent magnet has a magnetic core and movable core members to selectively magnetically couple the permanent magnet to each of the plurality of pole pairs.