ENHANCED SAFETY SYSTEM IN SUBSTRATE PROCESSING USING COMPRESSED DRY AIR

原文（中文）

A safety system in substrate processing comprises a substrate processing apparatus configured to process the substrates, the apparatus comprising a chamber and a showerhead, an input line configured to receive a process cooling water (PCW) from an outside PCW source for cooling the substrate processing apparatus, an inlet valve disposed at an entrance of the input line to control the input of the PCW, a drain line configured to gather the PCW from the substrate processing apparatus used for cooling and exhaust the gathered PCW, a plurality of channels configured to connect between the input line and the drain line, and the PCW flows inside of the channels and a safety unit configured to inject a compressed dry air (CDA) into the input line and/or purge the CDA and the PCW from the plurality of channels and the drain line.