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INORGANIC RECONSTITUTION CARRIER PANEL

发明专利审中
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20权利要求 · 3 独立
§ Ⅰ

卷宗概要

发明人

Brandon C. MARIN; Srinivas Venkata Ramanuja PIETAMBARAM; Jeremy D. ECTON; Hiroki TANAKA; Gang DUAN

IPC 分类

H1L 21/2H1L 23/H1L 23/31H1L 23/48H1L 25/65

CPC 分类

H1L21/2422H1L21/2118H1L23/3157H1L23/481H1L24/24H1L25/655H1L2224/24137

Embodiments disclosed herein include an apparatus that comprises a substrate, where the substrate comprises a glass layer with a first surface, a second surface, and a sidewall surface. In an embodiment, a via is provided through a thickness of the substrate, and a first layer is on the substrate, where the first layer is over the first surface and the sidewall surface of the substrate. In an embodiment, the first layer comprises a first organic dielectric material. In an embodiment, a second layer is spaced apart from the substrate by the first layer, and the second layer comprises a second organic dielectric material. In an embodiment, a die is over the second surface of the substrate, where the die is hybrid bonded to the via.

原文(中文)

Embodiments disclosed herein include an apparatus that comprises a substrate, where the substrate comprises a glass layer with a first surface, a second surface, and a sidewall surface. In an embodiment, a via is provided through a thickness of the substrate, and a first layer is on the substrate, where the first layer is over the first surface and the sidewall surface of the substrate. In an embodiment, the first layer comprises a first organic dielectric material. In an embodiment, a second layer is spaced apart from the substrate by the first layer, and the second layer comprises a second organic dielectric material. In an embodiment, a die is over the second surface of the substrate, where the die is hybrid bonded to the via.