MOBILE SENSOR DEVICES FOR SEMICONDUCTOR FABRICATION EQUIPMENT
卷宗概要
发明人
Travis R. Taylor; Todd A. Lopes; Pratik Vijay Yadav; Christopher William Burkhart
IPC 分类
CPC 分类
Systems and techniques for obtaining various types of sensor information regarding operational aspects of a semiconductor processing tool are disclosed. Such systems and techniques may involve an instrumented wafer that includes one or more different types of sensors, including, for example, pressure sensors, oxygen (or other gas) sensors, humidity sensors, upward- and/or outward-facing imaging sensors or optical sensors, microphone sensors, and so forth.
原文（中文）
Systems and techniques for obtaining various types of sensor information regarding operational aspects of a semiconductor processing tool are disclosed. Such systems and techniques may involve an instrumented wafer that includes one or more different types of sensors, including, for example, pressure sensors, oxygen (or other gas) sensors, humidity sensors, upward- and/or outward-facing imaging sensors or optical sensors, microphone sensors, and so forth.