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PACKAGE SUBSTRATE AND SEMICONDUCTOR PACKAGE INCLUDING THE SAME

发明专利审中
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20权利要求 · 3 独立
§ Ⅰ

卷宗概要

IPC 分类

H1L 23/498H1L 23/H1L 25/65

CPC 分类

H1L23/49838H1L23/49866H1L24/48H1L25/652H1L2224/48145H1L2224/48228H1L2924/1431

Provided is a package substrate that includes a substrate body part, a bonding pad, and a connection wiring that is connected to the bonding pad in a first direction parallel to a surface of the substrate body part. At least a portion of the bonding pad is embedded in the substrate body part. At least a portion of the connection wiring is embedded in the substrate body part. The bonding pad includes an embedding layer embedded in the substrate body part, a first metal layer formed on the embedding layer, and a second metal layer formed on the first metal layer. The first metal layer has an upper surface that is flat.

原文(中文)

Provided is a package substrate that includes a substrate body part, a bonding pad, and a connection wiring that is connected to the bonding pad in a first direction parallel to a surface of the substrate body part. At least a portion of the bonding pad is embedded in the substrate body part. At least a portion of the connection wiring is embedded in the substrate body part. The bonding pad includes an embedding layer embedded in the substrate body part, a first metal layer formed on the embedding layer, and a second metal layer formed on the first metal layer. The first metal layer has an upper surface that is flat.