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METHOD OF MANUFACTURING INTEGRATED CIRCUIT (IC) DEVICE HAVING STAND-ALONE FEED-THROUGH VIA AND SYSTEM FOR SAME

发明专利审中
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20权利要求 · 3 独立
§ Ⅰ

卷宗概要

申请人

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人

Cheng-Hua LIU; Kuang-Hung CHANG; Guan-Ming HUANG; Hsieh-Ting-Yang CHENG; Yuan-Te HOU

IPC 分类

H1L 23/522H1L 23/528

CPC 分类

H1L23/5226H1L23/528H1L23/5283H1L23/5286

A semiconductor device includes a circuit having a first pin; a first conductor extending in a first direction, the first circuit being between a second conductor and a first side of the first conductor; a circuit having a second pin; and a connection to couple a signal between the first pin and the second pin, the connection including: a first conductive element extending in a second direction, the first conductive element connected to the first pin on the first side of the first conductor; a first via structure connecting the first conductive element to a back of the substrate, including a first feed-through via (FTV) on a second side of the first conductor; a second via structure to provide the signal to a front of the substrate, the second via structure including a second FTV; and a second conductive element connected to the second via structure and the second pin.

原文(中文)

A semiconductor device includes a circuit having a first pin; a first conductor extending in a first direction, the first circuit being between a second conductor and a first side of the first conductor; a circuit having a second pin; and a connection to couple a signal between the first pin and the second pin, the connection including: a first conductive element extending in a second direction, the first conductive element connected to the first pin on the first side of the first conductor; a first via structure connecting the first conductive element to a back of the substrate, including a first feed-through via (FTV) on a second side of the first conductor; a second via structure to provide the signal to a front of the substrate, the second via structure including a second FTV; and a second conductive element connected to the second via structure and the second pin.