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MEMORY DEVICE INCLUDING CONTROL GATES HAVING TUNGSTEN STRUCTURE

发明专利审中
3浏览
20权利要求 · 3 独立
§ Ⅰ

卷宗概要

发明人

Jordan D. Greenlee; Rita J. Klein; Everett Allen McTeer; John Hopkins

IPC 分类

H1L 23/532H1L 21/768H1L 23/535H10B 41/27H10B 43/27

CPC 分类

H1L23/53257H1L21/76805H1L21/76895H1L23/535H10B41/27H10B43/27

Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first dielectric material; a second dielectric material separated from the first dielectric material; a memory cell string including a pillar extending through the first and second dielectric materials, the pillar including a portion between the first and second dielectric materials; and a tungsten material located between the first and second dielectric materials and separated from the portion of the pillar and the first and second dielectric materials by an additional dielectric material. The additional dielectric material has a dielectric constant greater than a dielectric constant of silicon dioxide. The additional dielectric material contacts the portion of the pillar and the tungsten material.

原文(中文)

Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first dielectric material; a second dielectric material separated from the first dielectric material; a memory cell string including a pillar extending through the first and second dielectric materials, the pillar including a portion between the first and second dielectric materials; and a tungsten material located between the first and second dielectric materials and separated from the portion of the pillar and the first and second dielectric materials by an additional dielectric material. The additional dielectric material has a dielectric constant greater than a dielectric constant of silicon dioxide. The additional dielectric material contacts the portion of the pillar and the tungsten material.