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WAFER-SCALE SYSTEM-IN-PACKAGE STRUCTURE AND FORMING METHOD THEREOF

发明专利审中
13浏览
20权利要求 · 2 独立
§ Ⅰ

卷宗概要

发明人

Danfeng YANG; Songhua XU; Ming HE; Pingping LI; Yao LI; Yaojian LIN

IPC 分类

H1L 25/16H1L 21/48H1L 21/56H1L 23/H1L 23/14H1L 23/31H1L 23/498H1L 23/538

CPC 分类

H1L25/16H1L21/4853H1L21/486H1L21/565H1L23/3185H1L23/49811H1L23/5383H1L23/5386H1L23/14H1L24/16H1L24/32H1L24/73H1L2224/16227H1L2224/16238H1L2224/32225H1L2224/73204

A wafer-scale system-in-package structure and a forming method thereof are disclosed. The package structure includes: a substrate, where the substrate includes an upper surface and a lower surface that are opposite to each other; a first molding layer that wraps the plurality of semiconductor chips and the upper surface of the substrate; external protrusions on the lower surface of the substrate; and a second molding layer that wraps side surfaces of the plurality of external protrusions and the lower surface of the substrate, where a thickness of the second molding layer is less than a thickness of the first molding layer, and at least one of the coefficient of thermal expansion or Young's modulus of the second molding layer is equal to or higher than that of the first molding layer. In this way, warpage of the system-in-package structure can be effectively controlled.

原文(中文)

A wafer-scale system-in-package structure and a forming method thereof are disclosed. The package structure includes: a substrate, where the substrate includes an upper surface and a lower surface that are opposite to each other; a first molding layer that wraps the plurality of semiconductor chips and the upper surface of the substrate; external protrusions on the lower surface of the substrate; and a second molding layer that wraps side surfaces of the plurality of external protrusions and the lower surface of the substrate, where a thickness of the second molding layer is less than a thickness of the first molding layer, and at least one of the coefficient of thermal expansion or Young's modulus of the second molding layer is equal to or higher than that of the first molding layer. In this way, warpage of the system-in-package structure can be effectively controlled.