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INTEGRATED CIRCUIT DEVICE INCLUDING A PERIPHERAL CIRCUIT AND METHOD OF MANUFACTURING THE SAME

发明专利审中
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20权利要求 · 3 独立
§ Ⅰ

卷宗概要

发明人

Hongwoo Seo; Hoil Bang; Junseong Song; Gyuhyun Kil; Hyunwoo Kim; Hwarang Kim

IPC 分类

H10D 30/67H10B 12/H10D 64/66

CPC 分类

H10D30/6757H10B12/50H10D30/6733H10D30/6755H10D64/665H10D64/667

An integrated circuit device including a plurality of gate stacks disposed on a substrate and including a first gate stack and a second gate stack, a spacer disposed on sidewalls of each of the plurality of gate stacks, a plurality of source/drain areas disposed in an upper portion of the substrate and at sides of the plurality of gate stacks, an active area disposed in the upper portion of the substrate and between adjacent source/drain areas of the plurality of source/drain areas, a channel semiconductor layer disposed between the active area and the second gate stack among the plurality of gate stacks.

原文(中文)

An integrated circuit device including a plurality of gate stacks disposed on a substrate and including a first gate stack and a second gate stack, a spacer disposed on sidewalls of each of the plurality of gate stacks, a plurality of source/drain areas disposed in an upper portion of the substrate and at sides of the plurality of gate stacks, an active area disposed in the upper portion of the substrate and between adjacent source/drain areas of the plurality of source/drain areas, a channel semiconductor layer disposed between the active area and the second gate stack among the plurality of gate stacks.