METHOD FOR MANUFACTURING AN OPTOELECTRONIC DEVICE COMPRISING AN LED AND A PHOTODIODE
卷宗概要
申请人
Commissariat à I'Énergie Atomique et aux Énergies Alternatives
发明人
Julia Simon; Fabian Rol; Patrick Le Maitre
IPC 分类
CPC 分类
A a method for manufacturing an optoelectronic device including at least one LED and at least one photodiode, including the following consecutive steps: a) epitaxially forming an active semiconductor emitting and receiving stack common to the LED and photodiode; b) forming trenches extending vertically through the active stack, and laterally delimiting the LED and photodiode, wherein the trenches are arranged so that the lateral dimensions of the LED are smaller than the lateral dimensions of the photodiode.
原文（中文）
A a method for manufacturing an optoelectronic device including at least one LED and at least one photodiode, including the following consecutive steps: a) epitaxially forming an active semiconductor emitting and receiving stack common to the LED and photodiode; b) forming trenches extending vertically through the active stack, and laterally delimiting the LED and photodiode, wherein the trenches are arranged so that the lateral dimensions of the LED are smaller than the lateral dimensions of the photodiode.