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Flexible pressure sensor and preparation method thereof, and electronic device

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72949987专利族
§ Ⅰ

卷宗概要

申请人

BOE TECHNOLOGY GROUP CO LTD; BEIJING BOE TECHNOLOGY DEV CO LTD

申请号

CN202010723154

发明人

LIANG KUI

申请日

Jul 24, 2020

公开日

Oct 4, 2022

专利族 ID

72949987

IPC 分类

G01L1/14G01L1/22G01L9/04G01L9/12

CPC 分类

G01L1/142G01L1/22G01L9/04G01L9/12

The invention provides a flexible pressure sensor and a preparation method thereof, and an electronic device. The flexible pressure sensor comprises a first electrode and a second electrode which areoppositely arranged, wherein a first dielectric layer and a second dielectric layer are arranged between the first electrode and the second electrode, the second dielectric layer is located between the first dielectric layer and the second electrode, the elasticity modulus of the first dielectric layer and the elasticity modulus of the second dielectric layer are different, and at least one of thefirst dielectric layer and the second dielectric layer is internally provided with a hollow structure. The flexible pressure sensor has the advantages of high sensitivity and wide range. According tothe flexible pressure sensor, the hollow structure in the dielectric layer can be prepared through a template, and the preparation method is simple.

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