Substrate fixing device and light emitting diode transfer method
数据来源:EPO OPS
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卷宗概要
申请号
CN202310183909
发明人
WANG CHENGFEI; YAN JUNWEI; CHEN ZHONGLIN; AN JINXIN; PEI GUANGHUI; ZHOU REN; CAO KANG; REN ZE
申请日
Feb 28, 2023
公开日
Aug 30, 2024
专利族 ID
92475569
IPC 分类
CPC 分类
The invention discloses a substrate fixing device and a light emitting diode transfer method, the fixing device comprises a carrying table, the carrying table comprises a carrying surface used for carrying a target substrate and supporting side walls located on two opposite sides of the carrying surface, and the carrying surface is provided with a plurality of air holes used for vacuum adsorption of the target carrying plate; the number of the fixing rods is multiple, the multiple fixing rods are arranged in parallel and detachably connected with the supporting side wall, and gaps used for containing target substrates are formed between the fixing rods and the carrying table; the fixing rod comprises a rod body and a clamping mechanism located on the rod body, and the clamping mechanism is configured to be capable of generating relative displacement with the bearing face and used for jointly applying acting force to the target substrate and a donor substrate located on the side, away from the carrying table, of the target substrate. According to the fixing device, acting force is applied to the donor substrate through the clamping mechanism, so that the donor substrate is pressed and fixed to the surface of the target substrate, and it is ensured that the donor substrate and the target substrate do not move relatively.
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