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Spatial light modulator

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数据来源:EPO OPS

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92765290专利族
§ Ⅰ

卷宗概要

申请人

HUAWEI TECH CO LTD; PENG CHENG LAB

申请号

CN202310336198

发明人

LI SHIQIANG; LU LIZHEN; LI TENGHAO; CHEN QUAN

申请日

Mar 24, 2023

公开日

Sep 24, 2024

专利族 ID

92765290

IPC 分类

G02F1/01G02F1/137

CPC 分类

B82Y20/00G02F1/01G02F1/0102G02F1/0147G02F1/13306G02F1/133553G02F1/13731G02F2202/30G02F2203/12G02F2203/50

The invention discloses a spatial light modulator which can be applied to the technical field of electro-optical modulators, the spatial light modulator sequentially comprises a conductive layer, a phase change material layer, a first dielectric layer comprising a micro-nano structure, a pixel layer and a circuit control layer along a first direction, the conductive layer is used for regulating and controlling electromagnetic waves to be modulated, the phase change material layer is used for performing reversible transformation between different phase states, and the first dielectric layer is used for regulating and controlling the electromagnetic waves to be modulated. The first dielectric layer is used for isolating the pixel layer and the phase change material layer, the micro-nano structure is used for reflecting electromagnetic waves to be modulated, each pixel in the pixel layer is used for independently controlling the optical characteristics of the electromagnetic waves interacting with the pixel, and the circuit control layer is used for independently controlling each pixel. In the application, the first dielectric layer which does not absorb or rarely absorbs the electromagnetic waves to be regulated and controlled can well isolate the pixel layer from the phase change material layer, and the micro-nano structure has a high refractive index, so that the reflecting capability of the electromagnetic waves to be regulated and controlled can be improved, and the light reflecting capability and the independent control capability of the pixel layer are fundamentally decoupled; and the design freedom degree of the pixel layer is improved.

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