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Photocathode, electron source module and electronic equipment

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数据来源:EPO OPS

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92765284专利族
§ Ⅰ

卷宗概要

申请人

HUAWEI TECH CO LTD

申请号

CN202310335695

发明人

ZHANG ZE; HE YIZUN; XIAO XIANG; HE ZHENGYU

申请日

Mar 24, 2023

公开日

Sep 24, 2024

专利族 ID

92765284

IPC 分类

H01J29/04H01J29/46H01J31/00

CPC 分类

G02B3/00H01J1/34H01J29/04H01J29/46H01J29/465H01J31/00

The embodiment of the invention provides a photocathode, an electron source module and electronic equipment, relates to the technical field of electron beam emission, and is used for solving the problem that exciting light is absorbed or reflected when a photocathode electron source generates a high-resolution electron beam. The photocathode comprises a substrate, an emission layer and a first focusing layer. The first focusing layer and the substrate layer are stacked on the same side of the emission layer. Excitation light provided by the light source passes through the first focusing layer before passing through the substrate and reaching the emission layer. The first focusing layer comprises a plurality of first focusing microstructures, and the first focusing microstructures can focus exciting light from the light source and then transmit the exciting light to the emission layer so as to provide electron beams.

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