Photocathode, electron source module and electronic equipment
数据来源:EPO OPS
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卷宗概要
申请号
CN202310335695
发明人
ZHANG ZE; HE YIZUN; XIAO XIANG; HE ZHENGYU
申请日
Mar 24, 2023
公开日
Sep 24, 2024
专利族 ID
92765284
IPC 分类
CPC 分类
The embodiment of the invention provides a photocathode, an electron source module and electronic equipment, relates to the technical field of electron beam emission, and is used for solving the problem that exciting light is absorbed or reflected when a photocathode electron source generates a high-resolution electron beam. The photocathode comprises a substrate, an emission layer and a first focusing layer. The first focusing layer and the substrate layer are stacked on the same side of the emission layer. Excitation light provided by the light source passes through the first focusing layer before passing through the substrate and reaching the emission layer. The first focusing layer comprises a plurality of first focusing microstructures, and the first focusing microstructures can focus exciting light from the light source and then transmit the exciting light to the emission layer so as to provide electron beams.
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