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Chip, chip stacking structure, chip packaging structure and electronic equipment

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数据来源:EPO OPS

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92777848专利族
§ Ⅰ

卷宗概要

申请人

HUAWEI TECH CO LTD

申请号

CN202310332340

发明人

ZHAO YANCHONG; BAI XIAOYANG; DONG JINWEN

申请日

Mar 23, 2023

公开日

Sep 24, 2024

专利族 ID

92777848

IPC 分类

H01L21/60H01L23/31H01L23/48H01L23/485

CPC 分类

H10W20/20H10W20/40H10W72/00H10W72/30H10W74/117H10W80/312H10W80/327H10W90/00H10W90/792H10W72/013H10W72/01935H10W72/01951H10W72/01953H10W72/931H10W72/952

[0001] This application provides a chip, a chip stack structure, a chip packaging structure, and an electronic device, relating to the field of semiconductor technology. The chip is bonded to other chips and achieves signal communication through a dielectric layer and multiple bonding devices penetrating the dielectric layer. The parasitic capacitance between adjacent bonding devices in the chip is relatively small, thereby improving the signal transmission performance of the chip. The chip includes: a wafer; a first dielectric layer disposed on one side of the wafer; and multiple bonding devices penetrating the first dielectric layer, including adjacent first and second bonding devices; a channel is formed between the first and second bonding devices in the first dielectric layer, and the dielectric constant within the channel is lower than the dielectric constant of the material of the first dielectric layer.

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