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Adapter plate and preparation method thereof, chip packaging structure and electronic equipment

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数据来源:EPO OPS

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92816642专利族
§ Ⅰ

卷宗概要

申请人

HUAWEI TECH CO LTD

申请号

CN202310355374

发明人

CHENG ZHIQIANG; REN YIWEI; ZHAO NAN; ZHANG TONGLONG; GUAN YONG; LI HENG

申请日

Mar 27, 2023

公开日

Sep 27, 2024

专利族 ID

92816642

IPC 分类

H01L23/31H01L23/48H01L25/07H10W74/01

CPC 分类

H10W20/01H10W20/023H10W20/0698H10W20/20H10W72/00H10W74/01H10W74/019H10W74/10H10W74/114H10W90/00

The embodiment of the invention provides an adapter plate and a preparation method thereof, a chip packaging structure and electronic equipment, relates to the technical field of semiconductors, and is used for reducing parasitic capacitance of metal wiring in the adapter plate. The adapter plate comprises a substrate and at least one rewiring layer stacked on the substrate. The rewiring layer comprises at least one first dielectric layer, at least one second dielectric layer, a metal wire and a first via hole, wherein the first dielectric layer and the second dielectric layer are alternately arranged, and the metal wire and the first via hole are electrically connected. Wherein the metal wiring is located in the first dielectric layer, and the first via hole is located in the second dielectric layer. And at least one gap is formed in the at least one second dielectric layer.

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