№ US20260002773A1発明
審査中Multibeam optical lever profiler
Multibeam optical lever profiler
We present a novel optical lever surface slope metrology tool employing a plurality of optical beams converging and crossing at the point close to the measured surface. The system increases the range and accuracy of the measurement.
❖Wojciech Jan WaleckiWojciech Jan Walecki§ 1/5 請求項G1B 11/2510