原始名称记载: JEOL Ltd.

There is provided an evaluation method of evaluating the density of a sample. The evaluation method starts with acquiring a backscattered electron spectrum from the sample. Then, an elastically scattered peak of the spectrum is separated into a plurality of minor peaks by waveform separation. Information about the positions and widths of the minor peaks is derived. The chemical elements making up the sample are identified from the positions and widths of the minor peaks.