№ EP4673964A1发明专利
审中IMPEDANCE MATCHING MODULE, IMPEDANCE MATCHING CIRCUIT, PLASMA PROCESS SUPPLY SYSTEM AND PLASMA PROCESS SYSTEM
IMPEDANCE MATCHING MODULE, IMPEDANCE MATCHING CIRCUIT, PLASMA PROCESS SUPPLY SYSTEM AND PLASMA PROCESS SYSTEM
❖TRUMPF Hüttinger GmbH + Co. KGNORDMANN, BirgerJan 6, 2026H01J, H03H, H05K24