№ US20260002541A1発明
審査中TURBOMOLECULAR VACUUM PUMP AND METHODS FOR MANUFACTURING A ROTOR
TURBOMOLECULAR VACUUM PUMP AND METHODS FOR MANUFACTURING A ROTOR
A turbomolecular vacuum pump including a stator and a rotor designed to rotate in the stator. The rotor includes a hub and at least one blade stage including blades distributed regularly about the periphery of the hub. The blades of at least one blade stage of the rotor are hollow.
❖PFEIFFER VACUUMNicolas VARENNES§ 2/17 請求項F4D 19/4, B33Y 80/, F4D 29/2 +119