元の名称記録: Japan Display Inc.; IDEMITSU KOSAN CO., LTD.

An oxide semiconductor film having crystallinity includes indium (In) and a first metal element (M1) selected from the group consisting of aluminum (Al), gallium (Ga), yttrium (Y), scandium (Sc), and lanthanoid elements. A crystal structure of the oxide semiconductor film is a bixbyite structure. At least a first peak of a (222) plane and a second peak of a (440) plane are observed in a diffraction pattern of the oxide semiconductor film obtained by an out-of-plane XRD measurement using Cu-Kα radiation. A ratio of an intensity of the first peak to an intensity of the second peak is less than or equal to 125.

A thin film transistor includes a metal oxide layer provided over a substrate, an oxide semiconductor layer including a plurality of crystal grains and provided in contact with the metal oxide layer, a gate electrode provided over the oxide semiconductor layer, and a gate insulating layer provided between the oxide semiconductor layer and the gate electrode. When a crystal orientation at each of a plurality of measurement points of the oxide semiconductor layer is obtained based on an electron diffraction pattern obtained by transmitting an electron beam irradiated from a direction intersecting a thickness direction of the oxide semiconductor layer, an average KAM value calculated at the plurality of measurement points is greater than or equal to 0.6 degrees.

A semiconductor device including a transistor, the transistor includes a first gate electrode, a first gate insulating film provided on the first gate electrode, an oxide semiconductor layer provided on the first gate insulating film, overlapping the first gate electrode, and having a polycrystalline structure, a second gate insulating film provided on the oxide semiconductor layer, and a second gate electrode provided on the second gate insulating film and overlapping the first gate electrode, wherein the first gate electrode has a first region and a second region, the first region overlaps the oxide semiconductor layer and protrudes in a first direction from the second gate electrode in a plan view, and the second region overlaps the second gate electrode and protrudes in a second direction that intersects the first direction from the oxide semiconductor layer in a plan view.