元の名称記録: Taiwan Semiconductor Manufacturing Company Limited

A method includes generating coherent light that has a wavefront, shaping the wavefront of the coherent light to provide the coherent light with a shaped wavefront, directing a probe beam of the coherent light with the shaped wavefront to an inspection surface of a wafer, causing a reflection beam to be reflected from the inspection surface of the wafer, capturing an image formed from the reflection beam reflected from the inspection surface of the wafer and generating image data related to the image, and analyzing the image data to determine whether there is a defect in the inspection surface of the wafer.

A phase change memory switch may be provided by forming a heater element, a first electrode, and a second electrode over an insulating layer that overlies a substrate; by forming encapsulated cavities formed within a dielectric material layer between a strip portion of the heater element and the first electrode and between the strip portion and the second electrode by depositing a dielectric material around, and over, the heater element, the first electrode, and the second electrode; and by forming a phase change material (PCM) portion over the heater element, the first electrode, and the second electrode such that the phase change material portion contacts the first electrode and the second electrode and is spaced from the heater element.