SUBSTRATE LOADING CASSETTE

原文（中国語）

Disclosed is a substrate loading cassette including an upper frame, a lower frame disposed to face the upper frame, a support frame configured to connect the upper frame and the lower frame to each other at an edge side of the substrate loading cassette, a transfer device coupling unit disposed on the upper frame, the transfer device coupling unit being coupled to a transfer device configured to transfer the substrate loading cassette, wherein the transfer device coupling unit includes a transfer device coupling frame and a vibration damping portion disposed under the transfer device coupling frame, the support frame includes a first support frame disposed on each of left and right sides of the substrate loading cassette and a second support frame disposed on a rear side of the substrate loading cassette, and the substrate loading cassette includes a support bar connected to the second support frame.