検索に戻る
案件記録

WAFER GRINDING METHODS

発明審査中
3閲覧数
14請求項 · 2 独立
§ Ⅰ

案件概要

発明者

YiJing Eric CHONG; Rowena ZARATE; Marites ROQUE; PeiEe Linda CHUA; KaiChong CHAN

IPC分類

B24B 37/4H1L 21/304

CPC分類

B24B37/42H1L21/304

A wafer grinding method comprises: providing a wafer base comprising a front side and a back side, wherein the front side comprises a solder ball area and an annular peripheral area surrounding the solder ball area; forming a patterned photoresist layer on the front side of the wafer base, wherein the patterned photoresist layer at least partially covers the annular peripheral area but exposes the solder ball area; forming solder balls on the solder ball area; attaching a back grinding tape on the front side to cover both the solder ball area and the annular peripheral area; and performing a back grinding process on the back side of the wafer base.

原文(中国語)

A wafer grinding method comprises: providing a wafer base comprising a front side and a back side, wherein the front side comprises a solder ball area and an annular peripheral area surrounding the solder ball area; forming a patterned photoresist layer on the front side of the wafer base, wherein the patterned photoresist layer at least partially covers the annular peripheral area but exposes the solder ball area; forming solder balls on the solder ball area; attaching a back grinding tape on the front side to cover both the solder ball area and the annular peripheral area; and performing a back grinding process on the back side of the wafer base.

外部リソース