MEMS DEVICE

原文（中国語）

A microelectromechanical device is provided that includes a first proof mass and a second proof mass. A first coupling structure is configured to transmit force in a primary direction between the first and second proof masses. The first coupling structure is connected to a primary spring structure in a first suspension structure that extends from a first anchor point to the first proof mass. The first primary spring structure is more flexible in the primary direction than in the y-direction.