SENSOR AND METHOD FOR MANUFACTURING THE SAME
案件概要
発明者
Ko YAMADA; Yumi HAYASHI; Naoki HIRAMATSU; Hiroshi HAMASAKI
IPC分類
CPC分類
According to one embodiment, a sensor includes an element portion. The element portion includes an element layer including a first face, a first electrode, a second electrode, and a first member. The first electrode is provided on the first face. The second electrode is provided on the first face. A direction from the second electrode to the first electrode is along a first direction. The first member includes an oxide. The first face includes a first region and a second region. The first region is recessed with respect to the second region. The first region and the second region overlap at least a part of the first electrode in a third direction. At least a part of the first electrode is between the first region and the first member in the third direction.
原文(中国語)
According to one embodiment, a sensor includes an element portion. The element portion includes an element layer including a first face, a first electrode, a second electrode, and a first member. The first electrode is provided on the first face. The second electrode is provided on the first face. A direction from the second electrode to the first electrode is along a first direction. The first member includes an oxide. The first face includes a first region and a second region. The first region is recessed with respect to the second region. The first region and the second region overlap at least a part of the first electrode in a third direction. At least a part of the first electrode is between the first region and the first member in the third direction.
外部リソース